Memory device and method for fabricating the memory device

ABSTRACT

Disclosed is a memory device and a method for fabricating the same, and the method may include forming an alternating stack in which dielectric layers and sacrificial layers are alternately stacked over a substrate, each of the sacrificial layers being a combination of porous and non-porous materials, forming a vertical opening penetrating the alternating stack, converting exposed surfaces of the sacrificial layers located on a side wall of the vertical opening into blocking layers through an oxidation process, forming a vertical channel structure contacting the blocking layers in the vertical opening, and replacing non-converting portions of the sacrificial layers with conductive layers, wherein each of the conductive layers comprises a round-like edge contacting each of the blocking layers.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a continuation application of U.S. patentapplication Ser. No. 16/710,916, filed on Dec. 11, 2019, and claimspriority to Korean Patent Application No. 10-2019-0068038, filed on Jun.10, 2019, which is incorporated herein by reference in its entirety.

BACKGROUND 1. Technical Field

Examples of embodiments generally relate to a method for fabricating asemiconductor device, and more particularly, to a memory device and amethod for fabricating the memory device.

2. Related Art

A semiconductor device may include a memory device capable of storingdata. The memory device may include memory cells. The memory cells maybe arranged in three dimensions.

Various technology developments are required to improve the operationalcharacteristics of the memory cells.

SUMMARY

In accordance with an embodiment, a method for fabricating a memorydevice may include: forming an alternating stack in which dielectriclayers and sacrificial layers are alternately stacked over a substrate,each of the sacrificial layers being a combination of porous andnon-porous materials; forming a vertical opening penetrating thealternating stack; converting exposed surfaces of the sacrificial layerslocated on a side wall of the vertical opening into blocking layersthrough an oxidation process; forming a vertical channel structurecontacting the blocking layers in the vertical opening; and replacingnon-converting portions of the sacrificial layers with conductivelayers, wherein each of the conductive layers comprises a round-likeedge contacting each of the blocking layers.

In accordance with an embodiment, a method for fabricating a memorydevice may include: forming an alternating stack in which dielectriclayers and sacrificial layers are alternately stacked over a substrate,each of the sacrificial layers being a combination of porous andnon-porous materials; forming a vertical opening penetrating thealternating stack; recessing vertical exposed surfaces of thesacrificial layers located on a side wall of the vertical opening torounded exposed surfaces; forming blocking layers that cover the roundedexposed surfaces of the sacrificial layers; forming a vertical channelstructure contacting the blocking layers in the vertical opening; andreplacing the sacrificial layers with conductive layers, wherein each ofthe conductive layers comprises a round-like edge contacting each of theblocking layers.

In accordance with an embodiment, a memory device may include: analternating stack of conductive layers and dielectric layers locatedover a substrate; a vertical channel structure that penetrates thealternating stack; a covering blocking layer that surrounds an outerwall of the vertical channel structure; and a protruding blocking layerthat extends from the covering blocking layer and contacts edges of theconductive layers, wherein each of the conductive layers comprises around-like edge contacting the protruding blocking layer.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a diagram illustrating a vertical memory device in accordancewith an embodiment.

FIG. 1B is a cross-sectional view illustrating the vertical memorydevice taken along an A-A′ line illustrated in FIG. 1A.

FIG. 1C is an enlarged view illustrating reference numeral 100′illustrated in FIG. 1B.

FIGS. 2A to 2H are diagrams for describing an example of a method forfabricating the vertical memory device illustrated in FIGS. 1A to 1C.

FIGS. 3A and 3B are diagrams for describing another example of a methodfor fabricating the vertical memory device illustrated in FIGS. 1A to1C.

FIG. 4 is a diagram illustrating a vertical memory device in accordancewith an embodiment.

FIG. 5A to 5G are diagrams for describing an example of a method forfabricating the vertical memory device illustrated in FIG. 4 .

FIGS. 6A and 6B are diagrams for describing another example of a methodfor fabricating the vertical memory device illustrated in FIG. 4 .

DETAILED DESCRIPTION

Various examples and embodiments described herein will be described withreference to cross-sectional views, plan views and block diagrams, whichare ideal schematic views of the present application. Thus, the shape ofthe illustrations may be modified by fabricating techniques and/ortolerances. Accordingly, the embodiments are not limited to the specificforms shown, but also include changes in the shapes that are generatedaccording to the fabricating process. The regions illustrated in thefigures have schematic attributes, and the shapes of the regionsillustrated in the figures are intended to illustrate specific types ofregions of the elements and are not intended to limit the scope.

FIG. 1A is a diagram illustrating a vertical memory device 100V inaccordance with an embodiment. FIG. 1B is a cross-sectional viewillustrating the vertical memory device 100V taken along an A-A′ lineillustrated in FIG. 1A.

Referring to FIGS. 1A and 1B, the vertical memory device 100V mayinclude a vertical NAND. The vertical memory device 100V may include athree-dimensional (3D) NAND. The vertical memory device 100V may includea substrate 101 and an alternating stack MC. The alternating stack MCmay be formed on the substrate 101. The vertical memory device 100V mayfurther include a plurality of vertical channel structures 107penetrating the alternating stack MC.

The alternating stack MC may have a structure in which a plurality ofgate structures 112 and a plurality of dielectric layers 103 arealternately stacked. The gate structures 112 and the dielectric layers103 may be alternately stacked in a first direction (reference numeral‘D1’ of FIG. 1B) perpendicular to the surface of the substrate 101. Thevertical channel structures 107 may penetrate the alternating stack MC.

The vertical channel structures 107 may extend vertically on thesubstrate 101. The vertical channel structures 107 may be formed invertical channel holes 105 penetrating the alternating stack MC. Each ofthe vertical channel structures 107 may include a memory stack and achannel layer 13. The memory stack may have a shape of surrounding thechannel layer 13. The memory stack may include a charge storage layer 11and a tunnel dielectric layer 12. The tunnel dielectric layer 12 mayhave a shape of surrounding the outer wall of the channel layer 13. Thecharge storage layer 11 may have a shape of surrounding the outer wallof the tunnel dielectric layer 12. The vertical channel structure 107may further include a core dielectric layer 14 and a conductive pad 15.The core dielectric layer 14 may be formed in the channel layer 13, andthe conductive pad 15 may be formed on the core dielectric layer 14. Thechannel layer 13 may include a semiconductor material. For example, thechannel layer 13 may include any one of a polycrystalline semiconductormaterial, an amorphous semiconductor material and a monocrystallinesemiconductor material. The channel layer 13 may include silicon (Si),germanium (Ge), silicon germanium (SiGe), an III/V-group compound or anII/VI-group compound. The channel layer 13 may include polysilicon. Thetunnel dielectric layer 12 may include silicon oxide, and the chargestorage layer 11 may include silicon nitride. The inner space of thechannel layer 13 may be fully filled with the core dielectric layer 14.The core dielectric layer 14 may include silicon oxide or siliconnitride. The conductive pad 15 may be formed on the core dielectriclayer 14. The inner space of the channel layer 13 may be filled with thecore dielectric layer 14 and the conductive pad 15. The conductive pad15 may include polysilicon doped with an impurity. The conductive pad 15may be electrically coupled to the channel layer 13.

A blocking layer 106 may have a shape of surrounding the outer wall ofthe vertical channel structure 107, for example, the outer wall of thecharge storage layer 11. The vertical channel structure 107 may contactthe blocking layer 106 while being formed in each of the verticalchannel holes 105.

Each of the gate structures 112 may have a shape of surrounding the sidewall of the vertical channel structure 107. The gate structure 112 maybe located between the plurality of dielectric layers 103. The gatestructure 112 may extend in a second direction (reference numeral ‘D2’of FIG. 1B) parallel to the surface of the substrate 101. A linerblocking layer 111 may be formed between the gate structure 112 and theblocking layer 106. The liner blocking layer 111 may be conformallyformed. The liner blocking layer 111 may be a material that is differentfrom the blocking layer 106. The liner blocking layer 111 may includealuminum oxide. The liner blocking layer 111 may have a shape ofsurrounding the blocking layer 106 and the vertical channel structure107.

The gate structure 112 may include a metal-based material. The gatestructure 112 may include a stack of a barrier layer and alow-resistance metal layer, for example, a stack of titanium nitride andtungsten.

The neighboring alternating stacks MC may be separated from each otherby an isolation recess 109. The isolation recess 109 may have a trenchshape. The isolation recess 109 may be referred to as a “slit”. Theneighboring gate structures 112 may be separated in units of blocks bythe isolation recesses 109. One block may include the one gate structure112 and the plurality of vertical channel structures 107. In one block,the plurality of vertical channel structures 107 may share the one gatestructure 112. From a top view, the plurality of vertical channelstructures 107 may be regularly arrayed. Although it is illustrated inthe present embodiment for convenience in description that threevertical channel structures 107 are included in one block, the array ofvertical channel structures 107 may be set in various manners.

FIG. 1C is an enlarged view illustrating reference numeral 100′illustrated in FIG. 1B.

Referring to FIG. 1C, the blocking layer 106 may include a coveringblocking layer 106V and a protruding blocking layer 106L. The protrudingblocking layer 106L may extend from the covering blocking layer 106V.

The protruding blocking layer 106L may include interface portions 106Iand a middle portion 106M between the interface portions 106I. Theinterface portions 106I may contact the dielectric layer 103. Theinterface portions 106I may have cusp shapes. The protruding blockinglayer 106L may include silicon oxynitride. The covering blocking layer106V may include silicon oxide.

The protruding blocking layer 106L may be non-conformally formed, andthe covering blocking layer 106V may be conformally formed. The edgeprofile of the gate structure 112 may be modified by the protrudingblocking layer 106L. The edge profile of the gate structure 112 may havea round-like profile.

The liner blocking layer 111 may be located between the protrudingblocking layer 106L and a round-like edge of the gate structure 112.

The round-like edge of the gate structure 112 may have a positiveprofile 112P which is covered by the protruding blocking layer 106L. Thesurface of the protruding blocking layer 106L may have a round-likeprofile, and the rounded surface of the protruding blocking layer 106Lmay be adjacent to the round-like edge of the gate structure 112. Therounded surface of the protruding blocking layer 106L may have anegative profile 106N.

FIGS. 2A to 2H are diagrams for describing an example of a method forfabricating the vertical memory device 100V illustrated in FIGS. 1A to1C.

As illustrated in FIG. 2A, a stack structure 102 may be formed on thesubstrate 101. The substrate 101 may be a material suitable forsemiconductor processing. The substrate 101 may include a semiconductorsubstrate. The substrate 101 may be formed of a material containingsilicon. The substrate 101 may include silicon, monocrystalline silicon,polysilicon, amorphous silicon, silicon germanium, monocrystallinesilicon germanium, polycrystalline silicon germanium, carbon-dopedsilicon, combinations thereof or multi-layers thereof. The substrate 101may include another semiconductor material, such as germanium. Thesubstrate 101 may include an III/V-group semiconductor substrate, forexample, a chemical compound semiconductor substrate such as a galliumarsenide (GaAs). The substrate 101 may include a Silicon-On-Insulator(SOI) substrate.

The stack structure 102 may include an alternating stack of thedielectric layer 103 and a sacrificial layer 104. For example, thealternating stack may have a structure in which the dielectric layer 103and the sacrificial layer 104 are alternately stacked. Each of thedielectric layer 103 and the sacrificial layer 104 may be formed of aplurality of layers. Although it is described in an embodiment forconvenience in description that four dielectric layers 103 and threesacrificial layers 104 are alternately stacked, the number of stacks ofthe dielectric layer 103 and the sacrificial layer 104 may be set invarious manners. The dielectric layer 103 and the sacrificial layer 104may be repeatedly stacked in a direction perpendicular to the surface ofthe substrate 101.

The dielectric layer 103 may include a material having an etchselectivity to the sacrificial layer 104. The dielectric layer 103 mayinclude silicon oxide, and the sacrificial layer 104 may include siliconnitride.

The sacrificial layer 104 may include a combination of porous andnon-porous materials. For example, the sacrificial layer 104 may have amultilayered structure including a first porous layer 104L, a non-porouslayer 104M and a second porous layer 104U. The first and second porouslayers 104L and 104U may be the same material. The non-porous layer 104Mmay be a different material from the first and second porous layers 104Land 104U. The non-porous layer 104M may have a larger thickness than thefirst and second porous layers 104L and 104U. The first and secondporous layers 104L and 104U may include a porous material, and thenon-porous layer 104M may include a non-porous material.

The first and second porous layers 104L and 104U may include a materialhaving a higher oxidation rate than the non-porous layer 104M.

The first porous layer 104L, the second porous layer 104U and thenon-porous layer 104M may be nitride-based materials. The first andsecond porous layers 104L and 104U may be a porous nitride, and thenon-porous layer 104M may be a non-porous nitride. In an embodiment, thefirst and second porous layers 104L and 104U may be porous siliconnitride, and the non-porous layer 104M may be non-porous siliconnitride. Each of the first and second porous layers 104L and 104U maydirectly contact the dielectric layer 103, and the non-porous layer 104Mmight not contact the dielectric layer 103.

As illustrated in FIG. 2B, the vertical channel hole 105 may be formedin the stack structure 102. From a top view, the vertical channel hole105 may have a hole shape. A part of the stack structure 102 may beetched to form the vertical channel hole 105. The vertical channel hole105 may expose a part of the surface of the substrate 101.

The dielectric layer 103 and the sacrificial layer 104 may besequentially etched anisotropically to form the vertical channel hole105. The vertical channel hole 105 may be formed in a directionperpendicular to the surface of the substrate 101.

Although not illustrated, from a plan view, the vertical channel hole105 may be formed in plural, and have a hole array structure. When thevertical channel hole 105 is formed, the surface of the substrate 101may be over-etched.

The side wall of the vertical channel hole 105 may be provided by aplurality of dielectric layers 103 and a plurality of sacrificial layers104. A part of the side wall of the vertical channel hole 105 may beprovided by the first porous layer 104L, the second porous layer 104Uand the non-porous layer 104M. In other words, parts of the first porouslayer 104L, the second porous layer 104U and the non-porous layer 104Mmay be exposed by the vertical channel hole 105.

As illustrated in FIG. 2C, the blocking layer 106 may be formed. Anoxidation process may be performed to form the blocking layer 106. Theside wall of the vertical channel hole 105 may be converted into theblocking layer 106 by the oxidation process. Exposed surfaces of thesacrificial layer 104 located on the side wall of the vertical channelhole 105 may be oxidized by the oxidation process. The oxidation processmay include a thermal oxidation process, a radical oxidation process, aplasma oxidation process or an In-Situ Steam Generation (ISSG) oxidationprocess. After forming the blocking layer 106, a non-converted residualsacrificial layer may remain between the dielectric layers 103 asindicated by reference numeral 104R.

The blocking layer 106 may include the covering blocking layer 106V andthe protruding blocking layer 106L. The covering blocking layer 106V maybe formed by oxidizing exposed surfaces of the dielectric layer 103. Theprotruding blocking layer 106L may be formed by laterally oxidizingexposed surfaces of the first porous layer 104L, the second porous layer104U and the non-porous layer 104M. The covering blocking layer 106V mayhave a uniform thickness. The protruding blocking layer 106L may have anon-uniform thickness.

The blocking layer 106 may cover the side wall of the vertical channelhole 105. The protruding blocking layer 106L may extend horizontallyfrom the covering blocking layer 106V.

The protruding blocking layer 106L may include the interface portions106I and the middle portion 106M between the interface portions 106I.The interface portions 106I may be formed by edge oxidation of the firstand second porous layers 104L and 104U. The middle portion 106M may beformed by edge oxidation of the non-porous layer 104M. The interfaceportions 106I may contact the dielectric layer 103.

During the oxidation process, the first and the second porous layers104L and 104U may be oxidized faster than the non-porous layer 104M.Thus, the exposed surfaces of the first and second porous layers 104Land 104U may be oxidized rapidly while the exposed surface of thenon-porous layer 104M is oxidized. When the first porous layer 104L, thenon-porous layer 104M and the second porous layer 104U include siliconnitride, the protruding blocking layer 106L may include siliconoxynitride. The covering blocking layer 106V may include silicon oxide.

As described above, the protruding blocking layer 106L may be formed bythe oxidation process, and be non-conformally formed. The edge profileof the sacrificial layer 104 may be modified by the protruding blockinglayer 106L. The edge profile of the sacrificial layer 104 may have around-like profile.

As the protruding blocking layer 106L is formed, the edge of a residualsacrificial layer 104R may have a round-like profile. The edge of theresidual sacrificial layer 104R may have a positive profile that iscovered by the protruding blocking layer 106L. The surface of theprotruding blocking layer 106L may have a round-like profile, and therounded surface of the protruding blocking layer 106L may contact theedge of the residual sacrificial layer 104R.

As illustrated in FIG. 2D, the vertical channel structure 107 may beformed. The vertical channel structure 107 may extend vertically fromthe surface of the substrate 101. The vertical channel structure 107 mayfill the vertical channel hole 105. The vertical channel structure 107may include a memory stack and a channel layer. The vertical channelstructure 107 may correspond to the vertical channel structure 107 ofFIG. 1B. The blocking layer 106 may have a shape of surrounding theouter wall of the vertical channel structure 107.

Referring back to FIG. 1B, the vertical channel structure 107 mayinclude the memory stack and the channel layer 13. The memory stack mayinclude the charge storage layer 11 and the tunnel dielectric layer 12.The tunnel dielectric layer 12 may have a shape of surrounding the outerwall of the channel layer 13. The charge storage layer 11 may have ashape of surrounding the outer wall of the tunnel dielectric layer 12.The blocking layer 106 may have a shape of surrounding the outer wall ofthe charge storage layer 11. is The vertical channel structure 107 mayfurther include the core dielectric layer 14 and the conductive pad 15.The core dielectric layer 14 may be formed in the channel layer 13, andthe conductive pad 15 may be formed on the core dielectric layer 14. Thechannel layer 13 may include a semiconductor material. For example, thechannel layer 13 may include any one of a polycrystalline semiconductormaterial, an amorphous semiconductor material and a monocrystallinesemiconductor material. The channel layer 13 may include silicon (Si),germanium (Ge), silicon germanium (SiGe), an III/V-group compound or anII/VI-group compound. The channel layer 13 may include polysilicon. Thetunnel dielectric layer 12 may include silicon oxide, and the chargestorage layer 11 may include silicon nitride. The inner space of thechannel layer 13 may be fully filled with the core dielectric layer 14.The core dielectric layer 14 may include silicon oxide or siliconnitride. The conductive pad 15 may be formed on the core dielectriclayer 14. The inner space of the channel layer 13 may be filled with thecore dielectric layer 14 and the conductive pad 15. The conductive pad15 may include polysilicon doped with an impurity. The conductive pad 15may be electrically coupled to the channel layer 13.

As illustrated in FIG. 2E, the isolation recess 109 may be formed.Another part of the stack structure 102 may be etched using a hard masklayer 108 in order to form the isolation recess 109. The isolationrecess 109 may extend vertically from the surface of the substrate 101.From a top view, the isolation recess 109 may have a line shape. Theisolation recess 109 may be referred to as a “slit” or a “trench”.

As illustrated in FIG. 2F, a horizontal recess 110 may be formed. Theresidual sacrificial layer 104R may be removed to form the horizontalrecess 110. The residual sacrificial layer 104R may be removed by a wetetch process. Since the residual sacrificial layer 104R includes siliconnitride, the wet etch process may be performed using phosphoric acid. Asthe residual sacrificial layer 104R is removed, the horizontal recess110 may be formed between the neighboring dielectric layers 103. Thehorizontal recess 110 may have a shape of surrounding the side walls ofthe vertical channel structure 107 and the protruding blocking layer106L. One end of the horizontal recess 110 may expose the roundedsurface of the protruding blocking layer 106L.

The horizontal recess 110 may extend in a direction parallel to thesurface of the substrate 101. The horizontal recess 110 may have a highaspect ratio of height H to depth W of 1:5 or more. The horizontalrecess 110 may have a high aspect ratio parallel to the surface of thesubstrate 101.

The inner edge profile of the horizontal recess 110 may have around-like profile. The round-like profile may be provided by thesurface of the protruding blocking layer 106L.

As illustrated in FIG. 2G, a liner layer 111′ and a preliminaryconductive layer 112′ may be sequentially formed in the horizontalrecess 110. For example, the liner layer 111′ may be conformally formedalong the profile of the horizontal recess 110, and subsequently, thepreliminary conductive layer 112′ may be formed on the liner layer 111′.The preliminary conductive layer 112′ may fully fill the horizontalrecess 110.

The liner layer 111′ may include a blocking material. The liner layer111′ may include aluminum oxide. The liner layer 111′ may be a differentmaterial from the blocking layer 106. The liner layer 111′ may be formedby Atomic Layer Deposition (ALD).

The preliminary conductive layer 112′ may gap-fill the horizontal recess110. The preliminary conductive layer 112′ may include a semiconductormaterial, a metal material or a combination thereof. The preliminaryconductive layer 112′ may include silicon, a metal, metal nitride, metalsilicide or combinations thereof. The preliminary conductive layer 112′may be formed by Chemical Vapor Deposition (CVD) or ALD. The preliminaryconductive layer 112′ may include a tungsten layer. In order to depositthe tungsten layer, tungsten and a fluorine-containing gas may be usedas a tungsten source gas, and a hydrogen-containing gas may be used as areaction gas. The tungsten source gas may include tungsten hexafluoride(WF₆). The reaction gas may include H₂. During the deposition of thetungsten layer, argon (Ar) may be added other than the tungsten sourcegas and the reaction gas. In some embodiments, the is preliminaryconductive layer 112′ may be formed by stacking titanium nitride andtungsten.

As the preliminary conductive layer 112′ is formed as described above,the horizontal recess 110 may be fully gap-filled with the liner layer111′ and the preliminary conductive layer 112′. The preliminaryconductive layer 112′ may be a stack of titanium nitride and tungsten(TiN/W).

In some embodiments, the liner layer 111′ may be omitted, and thus thehorizontal recess 110 may be fully gap-filled with the preliminaryconductive layer 112′. In an embodiment, the horizontal recess 110 maybe fully gap-filled with the preliminary conductive layer 112′ and thus,the conductive layers include a round-like edge contacting each of theblocking layers. For example, the rounded surface of the blocking layer106 is in contact with the round-like edge of the preliminary conductivelayer 112′.

As illustrated in FIG. 2H, the liner layer 111′ and the preliminaryconductive layer 112′ may be selectively separated. The liner layer 111′and the preliminary conductive layer 112′ may be removed to expose thetop surface of the hard mask layer 108. Through a process of selectivelyremoving the liner layer 111′ and the preliminary conductive layer 112′,the liner blocking layer 111 and the gate structure 112 may be formed inthe horizontal recess 110. Each of the liner blocking layer 111 and thegate structure 112 may have a shape of surrounding the side wall of theprotruding blocking layer 106L. An etch-back process may be performed onthe liner layer 111′ and the preliminary conductive layer 112′ to allowthe liner blocking layer 111 and the gate structure 112 to remain in thehorizontal recess 110.

The gate structure 112 may be formed without a void in the horizontalrecess 110, and thus be formed without a defect due to fumes in thehorizontal recess 110.

The edge of the gate structure 112 adjacent to the protruding blockinglayer 106L may have a round-like profile. The round-like profile may beprovided by the rounded surface of the protruding blocking layer 106L.

The rounded surface of the protruding blocking layer 106L may have anegative profile that covers a round-like edge of the gate structure112. The round-like edge of the gate structure 112 may have a positiveprofile that extends to the rounded surface of the protruding blockinglayer 106L.

FIGS. 3A and 3B are diagrams for describing another example of a methodfor fabricating the vertical memory device 100V illustrated in FIGS. 1Ato 1C. The method illustrated in FIGS. 3A and 3B may be similar to thatillustrated in FIGS. 2A to 2H. Hereinafter, descriptions of overlappingconfigurations will be omitted.

As illustrated in FIG. 2A, the stack structure 102 may be formed on thesubstrate 101. The stack structure 102 may include an alternating stackof the dielectric layer 103 and a sacrificial layer 104. For example,the alternating stack may have a structure in which the dielectric layer103 and the sacrificial layer 104 are alternately stacked. Each of thedielectric layer 103 and the sacrificial layer 104 may be formed of aplurality of layers.

The sacrificial layer 104 may include a combination of porous andnon-porous materials. For example, the sacrificial layer 104 may be amultilayered structure including a first porous layer 104L, a non-porouslayer 104M and a second porous layer 104U. The first and the secondporous layers 104L and 104U may be the same material. The non-porouslayer 104M may be a different material from the first and second porouslayers 104L and 104U. The non-porous layer 104M may have a largerthickness than the first and second porous layers 104L and 104U. Thefirst and second porous layers 104L and 104U may include a porousmaterial, and the non-porous layer 104M may include a non-porousmaterial.

The first and second porous layers 104L and 104U may include a materialhaving a higher wet etch rate than the non-porous layer 104M.

The first porous layer 104L, the second porous layer 104U and thenon-porous layer 104M may be nitride-based materials. The first andsecond porous layers 104L and 104U may be porous nitride, and thenon-porous layer 104M may be non-porous nitride. Each of the first andsecond porous layers 104L and 104U may directly contact the dielectriclayer 103, and the non-porous layer 104M might not contact thedielectric layer 103.

As illustrated in FIG. 2B, the vertical channel hole 105 may be formedin the stack structure 102. The side wall of the vertical channel hole105 may be provided by the dielectric layer 103 and the sacrificiallayer 104. A part of the side wall of the vertical channel hole 105 maybe provided by the first porous layer 104L, the second porous layer 104Uand the non-porous layer 104M. In other words, parts of the first porouslayer 104L, the second porous layer 104U and the non-porous layer 104Mmay be exposed by the vertical channel hole 105.

Subsequently, as illustrated in FIG. 3A, a vertical exposed surface ofthe sacrificial layer 104 located on the side wall of the verticalchannel hole 105 may be recessed to a round-like exposed surface 104S.Accordingly, the sacrificial layer 104 may have the round-like exposedsurface 104S. For example, in an embodiment, the sacrificial layer 104may have the rounded exposed surfaces 104S.

The sacrificial layer 104 may be exposed by a wet etch process to formthe round-like exposed surface 104S. The exposed surface of thesacrificial layer 104 located on the side wall of the vertical channelhole 105 may be etched by the wet etch process.

The exposed surfaces of the first porous layer 104L, the non-porouslayer 104M and the second porous layer 104U may be horizontally etchedto form the round-like exposed surface 104S. During the wet etchprocess, the first and second porous layers 104L and 104U may be etchedmore rapidly than the non-porous layer 104M. Accordingly, while theexposed surface of the non-porous layer 104M is etched, the exposedsurfaces of the first and second porous layers 104L and 104U may berapidly etched.

As described above, the round-like exposed surface 104S may be formed bythe wet etch process, and the edge profile of the residual sacrificiallayer 104R may be modified by the round-like exposed surface 104S. Theedge profile of the residual sacrificial layer 104R may have around-like profile.

As illustrated in FIG. 3B, the blocking layer 106 may be formed. Anoxide deposition process may be performed to form the blocking layer106. In some embodiments, an oxidation process may be performed to formthe blocking layer 106. The side wall of the vertical channel hole 105may be covered by the blocking layer 106 through the oxidation processor the oxide deposition process.

The blocking layer 106 may cover the side wall of the vertical channelhole 105. The blocking layer 106 may include the covering blocking layer106V and the protruding blocking layer 106L. The protruding blockinglayer 106L may extend horizontally from the covering blocking layer106V. The protruding blocking layer 106L and the covering blocking layer106V may include silicon oxide. The protruding blocking layer 106L mayinclude the interface portions 106I and the middle portion 106M betweenthe interface portions 106I. The interface portions 106I may contact theedges of the first and second porous layers 104L and 104U, and themiddle portion 106M may contact the edge of the non-porous layer 104M.The interface portions 106I may contact the dielectric layer 103 aswell.

As described above, the edge profile of the residual sacrificial layer104R may be modified by the wet etch process and the protruding blockinglayer 106L. The edge profile of the residual sacrificial layer 104R mayhave a round-like profile.

The edge of the residual sacrificial layer 104R may have the round-likeprofile. The edge of the residual sacrificial layer 104R may have apositive profile that is covered by the protruding blocking layer 106L.The surface of the protruding blocking layer 106L may have theround-like profile, and the rounded surface of the protruding blockinglayer 106L may contact the edge of the residual sacrificial layer 104R.

Subsequently, a series of processes illustrated in FIGS. 2E to 2H may beperformed.

FIG. 4 is a diagram illustrating a vertical memory device 200 inaccordance with an embodiment.

Referring to FIG. 4 , the vertical memory device 200 may include asubstrate 101, a vertical channel structure 107 formed on the substrate101 and an alternating stack surrounding the vertical channel structure107. The alternating stack may have a structure in which a plurality ofgate structures 112 and a plurality of dielectric layers 103 arealternately stacked. The gate structures 112 and the dielectric layers103 may be alternately stacked along a first direction D1 perpendicularto the surface of the substrate 101. The vertical channel structure 107may penetrate the alternating stack.

The vertical channel structure 107 may vertically extend in the firstdirection D1 on the substrate 101. The vertical channel structure 107may be formed in a vertical channel hole (reference numeral omitted,refer to reference numeral ‘105’ of FIG. 1A) penetrating the alternatingstack. A blocking layer 126 and a liner blocking layer 111 may be formedto surround the outer wall of the vertical channel structure 107. Eachof the gate structures 112 may be provided between the plurality ofdielectric layers 103. The gate structure 112 may extend in a seconddirection D2 parallel to the surface of the substrate 101. The verticalchannel structure 107 may be substantially the same as the verticalchannel structure 107 of FIG. 1A.

As illustrated in FIG. 4 , the blocking layer 126 may include a coveringblocking layer 126V and a protruding blocking layer 126L. The protrudingblocking layer 126L may extend horizontally from the covering blockinglayer 126V. The protruding blocking layer 126L may have a positiveprofile 126P. In other words, the protruding blocking layer 126L mayhave a surface protruding in an edge direction of the gate structure112. The protruding blocking layer 126L may include interface portions126I and a middle portion 126M between the interface portions 126I. Theinterface portions 126I may contact the dielectric layers 103.

The protruding blocking layer 126L may include silicon oxynitride. Thecovering blocking layer 106V may include silicon oxide.

As described above, the protruding blocking layer 126L may benon-conformally formed. The edge profile of the gate structure 112 maybe modified by the protruding blocking layer 126L. The edge profile ofthe gate structure 112 may have a round-like profile.

The round-like edge of the gate structure 112 may have a negativeprofile 112N that is covered by the protruding blocking layer 126L. Thesurface of the protruding blocking layer 126L may have the round-likeprofile, and the rounded surface of the protruding blocking layer 126Lmay contact the round-like edge of the gate structure 112.

FIG. 5A to 5G are diagrams for describing an example of a method forfabricating the vertical memory device 200 illustrated in FIG. 4 .

As illustrated FIG. 5A, a stack structure 102 may be formed on thesubstrate 101. The substrate 101 may be a material suitable forsemiconductor processing. The substrate 101 may include a semiconductorsubstrate. The substrate 101 may be formed of a silicon-containingmaterial. The substrate 101 may include silicon, monocrystallinesilicon, polysilicon, amorphous silicon, silicon germanium,monocrystalline silicon germanium, polycrystalline silicon germanium,carbon-doped silicon, combinations thereof or multi-layers thereof. Thesubstrate 101 may include another semiconductor material, such asgermanium. The substrate 101 may include an III/V-group semiconductorsubstrate, for example, a chemical compound semiconductor substrate suchas a gallium arsenide (GaAs). The substrate 101 may include aSilicon-On-Insulator (SOI) substrate.

The stack structure 102 may include an alternating stack of thedielectric layer 103 and a sacrificial layer 124. For example, thealternating stack may have a structure in which the dielectric layer 103and the sacrificial layer 124 are alternately stacked. Each of thedielectric layer 103 and the sacrificial layer 124 may be formed of aplurality of layers.

The sacrificial layer 124 may include a combination of porous andnon-porous materials. For example, the sacrificial layer 124 may have amultilayered structure including a first non-porous layer 124L, a porouslayer 124M and a second non-porous layer 124U. The first and secondnon-porous layers 124L and 124U may be the same material. The porouslayer 124M may be a different material from the first and secondnon-porous layers 124L and 124U. The porous layer 124M may have a largerthickness than the first and second non-porous layers 124L and 124U. Thefirst and second non-porous layers 124L and 124U may include anon-porous material, and the porous layer 124M may include a porousmaterial.

The first and second non-porous layers 124L and 124U may include amaterial having a lower oxidation rate than the porous layer 124M.

The first and second non-porous layers 124L and 124U and the porouslayer 124M may be nitride-based materials. The first and secondnon-porous layers 124L and 124U may be a non-porous nitride, and theporous layer 124M may be a porous nitride. In an embodiment, the firstand second non-porous layers 124L and 124U may be non-porous siliconnitride, and the porous layer 124M may be a porous silicon nitride. Eachof the first and second non-porous layers 124L and 124U may directlycontact the dielectric layer 103, and the porous layer 124M might notcontact the dielectric layer 103.

As illustrated in FIG. 5B, a vertical channel hole 105 may be formed inthe stack structure 102.

The side wall of the vertical channel hole 105 may be provided by thedielectric layer 103 and the sacrificial layer 124. A part of the sidewall of the vertical channel hole 105 may be provided by the first andsecond non-porous layers 124L and 124U and the porous layer 124M. Inother words, parts of the first and second non-porous layers 124L and124U and the porous layer 124M may be exposed by the vertical channelhole 105.

As illustrated in FIG. 5C, the blocking layer 126 may be formed. Anoxidation process may be performed to form the blocking layer 126. Theside wall of the vertical channel hole 105 may be converted into theblocking layer 126 by the oxidation process. Exposed surfaces of thesacrificial layer 124 located on the side wall of the vertical channelhole 105 may be oxidized by the oxidation process.

The blocking layer 126 may include the covering blocking layer 126V andthe protruding blocking layer 126L. The covering blocking layer 126V maybe formed by oxidizing the exposed surfaces of the dielectric layer 103.The protruding blocking layer 126L may be formed by laterally oxidizingexposed surfaces of the first and second non-porous layers 124L and 124Uand the porous layer 124M. The covering blocking layer 126V may have auniform thickness. The protruding blocking layer 126L may have anon-uniform thickness.

The blocking layer 126 may cover the side wall of the vertical channelhole 105. The protruding blocking layer 126L may extend horizontallyfrom the covering blocking layer 126V.

The protruding blocking layer 126L may include the interface portions126I and the middle portion 126M between the interface portions 126I.

The interface portions 126I may be formed by edge oxidation of the firstand second non-porous layers 124L and 124U. The middle portion 126M maybe formed by edge oxidation of the porous layer 124M. The interfaceportions 106I may contact the dielectric layer 103.

During the oxidation process, the first and second non-porous layers124L and 124U may be oxidized slower than the porous layer 124M. Thus,the exposed surfaces of the first and second non-porous layers 124L and124U may be oxidized slowly while the exposed surface of the porouslayer 124M is oxidized. When the first non-porous layer 124L, the porouslayer 124M and the second non-porous layer 124U include silicon nitride,the protruding blocking layer 126L may include silicon oxynitride. Thecovering blocking layer 126V may include silicon oxide.

As described above, the protruding blocking layer 126L may be formed bythe oxidation process, and be non-conformally formed. The edge profileof the sacrificial layer 124 may be modified by the protruding blockinglayer 126L. The edge profile of the sacrificial layer 124 may have around-like profile.

As the protruding blocking layer 126L is formed, the edge of a residualsacrificial layer 124R may have a round-like profile. The edge of theresidual sacrificial layer 124R may have a positive profile that iscovered by the protruding blocking layer 126L. The surface of theprotruding blocking layer 126L may have a round-like profile, and therounded surface of the protruding blocking layer 126L may contact theedge of the residual sacrificial layer 124R.

As illustrated in FIG. 5D, the vertical channel structure 107 may beformed. The vertical channel structure 107 may extend vertically fromthe surface of the substrate 101. The vertical channel structure 107 mayfill the vertical channel hole 105. The blocking layer 126 may have ashape of surrounding the outer wall of the vertical channel structure107.

As illustrated in FIG. 5E, an isolation recess 109 may be formed.Another part of the stack structure 102 may be etched using a hard masklayer 108 in order to form the isolation recess 109. The isolationrecess 109 may extend vertically from the surface of the substrate 101.From a top view, the isolation recess 109 may have a line shape. Theisolation recess 109 may be referred to as a “slit” or a “trench”.

As illustrated in FIG. 5F, a horizontal recess 110 may be formed. Theresidual sacrificial layer 124R may be removed to form the horizontalrecess 110. Accordingly, the horizontal recess 110 may be formed betweenthe neighboring dielectric layers 103. The horizontal recess 110 mayhave a shape of surrounding the side walls of the vertical channelstructure 107 and the protruding blocking layer 126L. One end of thehorizontal recess 110 may expose the rounded surface of the protrudingblocking layer 126L.

The horizontal recess 110 may extend in a direction parallel to thesurface of the substrate 101. The horizontal recess 110 may have a highaspect ratio of height H to depth W of 1:5 or more. The horizontalrecess 110 may have a high aspect ratio parallel to the surface of thesubstrate 101.

The inner edge profile of the horizontal recess 110 may have around-like profile. The round-like profile may be provided by thesurface of the protruding blocking layer 126L.

As illustrated in FIG. 5G, the horizontal recess 110 may be filled withthe liner blocking layer 111 and the gate structure 112. The methods forforming the liner blocking layer 111 and the gate structure 112 may besubstantially the same as those illustrated in FIGS. 2F and 2G.

FIGS. 6A and 6B are diagrams for describing another example of a methodfor fabricating the vertical memory device 200 illustrated in FIG. 4 .

As illustrated in FIG. 5A, the stack structure 102 may be formed on thesubstrate 101. The stack structure 102 may include an alternating stackof the dielectric layer 103 and a sacrificial layer 124. For example,the alternating stack may have a structure in which the dielectric layer103 and the sacrificial layer 124 are alternately stacked. Each of thedielectric layer 103 and the sacrificial layer 124 may be formed of aplurality of layers.

The sacrificial layer 124 may include a combination of porous andnon-porous materials. For example, the sacrificial layer 124 may have amultilayered structure including a first non-porous layer 124L, a porouslayer 124M and a second non-porous layer 124U. The first and secondnon-porous layers 124L and 124U may be the same material. The porouslayer 124M may be a different material from the first and secondnon-porous layers 124L and 124U. The porous layer 124M may have a largerthickness than the first and second non-porous layers 124L and 124U. Thefirst and second non-porous layers 124L and 124U may include anon-porous material, and the porous layer 124M may include a porousmaterial.

The first and second non-porous layers 124L and 124U may include amaterial having a lower oxidation rate than the porous layer 124M.

The first and second non-porous layers 124L and 124U and the porouslayer 124M may be nitride-based materials. The first and secondnon-porous layers 124L and 124U may be non-porous nitride, and theporous layer 124M may be porous nitride. Each of the first and secondnon-porous layers 124L and 124U may directly contact the dielectriclayer 103, and the porous layer 124M might not contact the dielectriclayer 103.

As illustrated in FIG. 5B, the vertical channel hole 105 may be formedin the stack structure 102.

The side wall of the vertical channel hole 105 may be provided by thedielectric layer 103 and the sacrificial layer 124. A part of the sidewall of the vertical channel hole 105 may be provided by the first andsecond non-porous layers 124L and 124U and the porous layer 124M. Inother words, parts of the first and second non-porous layers 124L and124U and the porous layer 124M may be exposed by the vertical channelhole 105.

Subsequently, as illustrated in FIG. 6A, a vertical exposed surface ofthe sacrificial layer 124 located on the side wall of the verticalchannel hole 105 may be recessed to a round-like exposed surface 124S.The sacrificial layer 124 may be exposed by a wet etch process to formthe round-like exposed surface 124S. The exposed surface of thesacrificial layer 124 located on the side wall of the vertical channelhole 105 may be etched by the wet etch process. Accordingly, a residualsacrificial layer 124R may have the round-like exposed surface 124S.

The exposed surfaces of the first non-porous layer 124L, the porouslayer 124M and the second non-porous layer 124U may be horizontallyetched to from the round-like exposed surface 124S. During the wet etchprocess, the first and second non-porous layers 124L and 124U may beetched slower than the porous layer 124M. Accordingly, while the exposedsurface of the porous layer 124M is etched, the exposed surfaces of thefirst and second non-porous layers 124L and 124U may be etched slowly.

As described above, the round-like exposed surface 124S may be formed bythe wet etch process, and the edge profile of the residual sacrificiallayer 124R may be modified by the round-like exposed surface 124S. Theedge profile of the residual sacrificial layer 124R may have around-like profile.

As illustrated in FIG. 6B, the blocking layer 126 may be formed. Anoxide deposition process may be performed to form the blocking layer126. The side wall of the vertical channel hole 105 may be covered bythe blocking layer 126 by the oxide deposition process. In someembodiment, an oxidation process may be performed to form the blockinglayer 126.

The blocking layer 126 may cover the side wall of the vertical channelhole 105. The blocking layer 126 may include the covering blocking layer126V and the protruding blocking layer 126L. The protruding blockinglayer 126L may extend horizontally from the covering blocking layer126V.

The protruding blocking layer 126L may include the interface portions126I and the middle portion 126M between the interface portions 126I.The interface portions 126I may contact the dielectric layer 103. Theprotruding blocking layer 126L may include silicon oxynitride. Thecovering blocking layer 126V may include silicon oxide. In someembodiments, the protruding blocking layer 126L and the coveringblocking layer 126V may include silicon oxide.

As described above, the edge profile of the residual sacrificial layer124R may be modified by the wet etch process and the protruding blockinglayer 126L. The edge profile of the residual sacrificial layer 124R mayhave a round-like profile.

An edge of the residual sacrificial layer 124R may have the round-likeprofile. The edge of the residual sacrificial layer 124R may have apositive profile that is covered by the protruding blocking layer 126L.The surface of the protruding blocking layer 126L may have theround-like profile, and the rounded surface of the protruding blockinglayer 126L may contact the edge of the sacrificial layer 124.

Subsequently, a series of processes illustrated in FIGS. 5E to 5G may beperformed.

Although it is described in the embodiments that the sacrificial layers104 and 124 are combinations of porous and non-porous materials, thesacrificial layers 104 and 124 may be formed of silicon nitride in whicha silicon atom content and a nitrogen atom content are adjusted, in someembodiments. For example, a stack of silicon-rich silicon nitride andnitrogen-rich silicon nitride may be applied to have the difference inoxidation rates and the difference in wet etch rates. The silicon-richsilicon nitride may have a higher oxidation rate than the nitrogen-richsilicon nitride. In addition, the silicon-rich silicon nitride may havea higher wet etch rate than the nitrogen-rich silicon nitride.

Although it is described in the embodiments that the oxidation processis performed to form the blocking layer 106, the blocking layer 106 maybe formed by deposition and oxidation processes of a silicon-containingmaterial, in some embodiments. For example, after the vertical channelhole 105 is formed, a silicon layer may be deposited on the verticalchannel hole 105, and subsequently the oxidation process may beperformed to convert the silicon layer to silicon oxide. In such aprocess of converting the silicon oxide, the edge of the sacrificiallayer 104 may be selectively oxidized, and the protruding blocking layer106L may be formed.

According to the embodiments, the edge profile of the gate structure maybe formed in a negative manner, thereby reinforcing the edge-sideelectric field of the gate structure and improving erase and programcharacteristics.

According to the embodiments, the edge profile of the gate structure maybe formed in a positive manner, thereby improving disturbance andZ-interference.

While the present embodiments have been described with respect to thespecific embodiments, it should be noted that the embodiments are fordescribing, not limiting, the present embodiments. Further, it should benoted that the present embodiments may be achieved in various waysthrough substitution, change, and modification, by those skilled in theart without departing from the scope of the present disclosure asdefined by the following claims.

What is claimed is:
 1. A memory device comprising: an alternating stackof conductive layers and dielectric layers located over a substrate; avertical channel structure that penetrates the alternating stack; acovering blocking layer that surrounds an outer wall of the verticalchannel structure; and a protruding blocking layer that extends from thecovering blocking layer and contacts edges of the conductive layers,wherein each of the conductive layers comprises a round-like edgecontacting the protruding blocking layer, wherein the protrudingblocking layer contacts the dielectric layers, and comprises interfaceportions having cusp shapes and a middle portion between the interfaceportions, and wherein each of the interface portions comprises oxide ofporous nitride.
 2. The memory device of claim 1, wherein the protrudingblocking layer has a rounded recessing surface contacting the round-likeedge of the conductive layer.
 3. The memory device of claim 1, whereinthe middle portion comprises oxide of non-porous nitride.
 4. A memorydevice comprising: an alternating stack of conductive layers anddielectric layers located over a substrate; a vertical channel structurethat penetrates the alternating stack; a covering blocking layer thatsurrounds an outer wall of the vertical channel structure; and aprotruding blocking layer that extends from the covering blocking layerand contacts edges of the conductive layers, wherein each of theconductive layers comprises a round-like edge contacting the protrudingblocking layer, wherein the protruding blocking layer has a roundedprotruding surface, wherein the protruding blocking layer comprisesinterface portions contacting the dielectric layers and a middle portionbetween the interface portions, and wherein each of the interfaceportions comprises oxide of non-porous nitride.
 5. The memory device ofclaim 4, wherein the middle portion comprises oxide of porous nitride.6. The memory device of claim 1, wherein each of the covering blockinglayer and the protruding blocking layer comprises silicon oxide.
 7. Thememory device of claim 1, wherein the covering blocking layer comprisessilicon oxide, and the protruding blocking layer comprises siliconoxynitride.